ASML Holding NV (ASML), Europe’s biggest semiconductor equipment maker, today said Taiwan Semiconductor Manufacturing Co. will acquire a 5 percent equity stake in the company for 838 million euros ($1.04 billion).

TSMC has joined ASML’s “Customer Co-Investment Program for innovation, committing to invest 276 million euros in research and development of next generation lithography technologies,” ASML said in a statement today.

ASML announced earlier this month that Intel Corp. had also joined the program.

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